Making wafers with reclaimed water?
Semiconductor manufacturing places rigorous demands on water quality. According to TSMC, the water used in its advanced manufacturing processes cannot exceed one milliliter of impurities in the equivalent of 1,000 Olympic-sized swimming pools of water. Using reclaimed water for advanced semiconductor processes, therefore, poses huge technical challenges.
Since 2015, TSMC had been running simulations on how to best make use of reclaimed wastewater on its production lines. In 2022, TSMC’s dedicated water reclamation plant in the Southern Taiwan Science Park (STSP) officially began operations, marking the first example of the use of reclaimed industrial water in advanced semiconductor manufacturing.
To ensure high chip yield rates, TSMC employs nearly 1,000 personnel at each plant to conduct strict quality-control measures. Starting with its mature process fabs, the company introduced reclaimed water into its five-nanometer and three-nanometer advanced processes in 2024. It was a major milestone of green innovation for the industry.

TSMC is a world leader in successfully reusing reclaimed industrial water in advanced semiconductor manufacturing processes.